Design of a High speed high performance linear axis
This figure shows a linear motion axis equipped with an ironless linear motor and aerostatic bearings1) preloaded by permanent magnets. The slide surface is made of structural steel coated with a hard chromium layer and is finally grinded. The circular thrust bearings of 40mm diameter are designed to carry a load up to 400N each when fed with a supply pressure of 5 bars. The nominal film thickness amounts 3Ám. The moving mass of the rotor is 2.9 kg. With the peak force of the linear motor of 470 N the rotor accelerates with 160 m/s2. A linear encoder is used with which the position of the stage can be controlled within tenths of a micrometer.